| Using BaTi03 based ZSU material and silver-palladium internal
electrode, multilayer ceramic capacitors (MLC) were fabricated.
The MLC had 24 effective dielectric layers, thickness of one layer
was about 20 IJm and the capacitance was 0.1 IJF. Formation of
green chips, binder burnout, sintering, terminations of electrode
were described. Internal structure showed no de-lamination
between electrode/dielectric interfaces. Surface microstructure
of dielectrics depicted average grain size of about 6-7
IJm. Temperature dependence of capacitances and tan ll
were investigated. The MLC had very high resonant frequency
-2.1 MHz and very low ESR -3.6 n. |
